JPH0465443U - - Google Patents

Info

Publication number
JPH0465443U
JPH0465443U JP10898590U JP10898590U JPH0465443U JP H0465443 U JPH0465443 U JP H0465443U JP 10898590 U JP10898590 U JP 10898590U JP 10898590 U JP10898590 U JP 10898590U JP H0465443 U JPH0465443 U JP H0465443U
Authority
JP
Japan
Prior art keywords
film
spacer
reel
winds
pulled out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10898590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10898590U priority Critical patent/JPH0465443U/ja
Publication of JPH0465443U publication Critical patent/JPH0465443U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
JP10898590U 1990-10-19 1990-10-19 Pending JPH0465443U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10898590U JPH0465443U (en]) 1990-10-19 1990-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10898590U JPH0465443U (en]) 1990-10-19 1990-10-19

Publications (1)

Publication Number Publication Date
JPH0465443U true JPH0465443U (en]) 1992-06-08

Family

ID=31856134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10898590U Pending JPH0465443U (en]) 1990-10-19 1990-10-19

Country Status (1)

Country Link
JP (1) JPH0465443U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7292308B2 (en) 2004-03-23 2007-11-06 Asml Holding N.V. System and method for patterning a flexible substrate in a lithography tool
JP2007314347A (ja) * 2006-04-27 2007-12-06 Orc Mfg Co Ltd 搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7292308B2 (en) 2004-03-23 2007-11-06 Asml Holding N.V. System and method for patterning a flexible substrate in a lithography tool
JP2007314347A (ja) * 2006-04-27 2007-12-06 Orc Mfg Co Ltd 搬送装置

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