JPH0465443U - - Google Patents
Info
- Publication number
- JPH0465443U JPH0465443U JP10898590U JP10898590U JPH0465443U JP H0465443 U JPH0465443 U JP H0465443U JP 10898590 U JP10898590 U JP 10898590U JP 10898590 U JP10898590 U JP 10898590U JP H0465443 U JPH0465443 U JP H0465443U
- Authority
- JP
- Japan
- Prior art keywords
- film
- spacer
- reel
- winds
- pulled out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 238000004804 winding Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10898590U JPH0465443U (en]) | 1990-10-19 | 1990-10-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10898590U JPH0465443U (en]) | 1990-10-19 | 1990-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0465443U true JPH0465443U (en]) | 1992-06-08 |
Family
ID=31856134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10898590U Pending JPH0465443U (en]) | 1990-10-19 | 1990-10-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0465443U (en]) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7292308B2 (en) | 2004-03-23 | 2007-11-06 | Asml Holding N.V. | System and method for patterning a flexible substrate in a lithography tool |
JP2007314347A (ja) * | 2006-04-27 | 2007-12-06 | Orc Mfg Co Ltd | 搬送装置 |
-
1990
- 1990-10-19 JP JP10898590U patent/JPH0465443U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7292308B2 (en) | 2004-03-23 | 2007-11-06 | Asml Holding N.V. | System and method for patterning a flexible substrate in a lithography tool |
JP2007314347A (ja) * | 2006-04-27 | 2007-12-06 | Orc Mfg Co Ltd | 搬送装置 |